측정 범위 : 1, 5mm
Linearity(Full Range) : 0.5, 0.2%
Linearity(limited Range) : 0.25, 0.1%
Resolution : 1?m
반복정밀도 : 2?m
Spot Diameter : 30?m
Operation Angle : ±5º
온도에 따른 변화량(?m/º) : 2?m/º
Reading Rate : 4000 R/s
Bandwidth : 50Hz(10Hz)